English
INFICON SKY CDG160D high temperature manometers are your best choice for accurate total pressure measurement and control.
CDG160D gauges are temperature controlled at 160 °C for superior performance in demanding semiconductor and plasma processes. They are available for full scale ranges from 1 Torr to 1000 Torr, with all common flange types and fieldbus interfaces and provide a linear 0 to 10 V, gas type independent, pressure signal. INFICON capacitance manometers use an ultra pure alumina ceramic diaphragm which is corrosion proof.
The advantages of the ceramic sensor are better signal stability, faster recovery from atmosphere, short warm up time and an extraordinary lifetime. INFICON CDG are high quality, cost effective pressure sensors for demanding semiconductor, plasma and vacuum applications.
Also available with EtherCAT digital interface!
| Code | Type | Measuring range | Gauge model | Precision: % of measurement [%] | Full scale (hPa) | Flange | Price ex. | Stock | Qty | More info | |
|---|---|---|---|---|---|---|---|---|---|---|---|
| HVC-3CE1-G61-2300 | Capacitance gauge | 1 · 10-1 – 1.1 · 10*3 mbar | CDG160D | 0,15 | 1000 | DN 16 ISO-KF | On request | More info | |||
| HVC-3CE1-G63-2300 | Capacitance gauge | 1 · 10-1 – 1.1 · 10*3 mbar | CDG160D | 0,15 | 1000 | DN 16 CF-R | On request | More info | |||
| HVC-3CE1-G69-2300 | Capacitance gauge | 1 · 10-1 – 1.1 · 10*3 mbar | CDG160D | 0,15 | 1000 | tube OD ½” | On request | More info | |||
| HVC-3CE1-G6C-2300 | Capacitance gauge | 1 · 10-1 – 1.1 · 10*3 mbar | CDG160D | 0,15 | 1000 | 4 VCR male | On request | More info | |||
| HVC-3CE1-G6D-2300 | Capacitance gauge | 1 · 10-1 – 1.1 · 10*3 mbar | CDG160D | 0,15 | 1000 | 4 VCR female | On request | More info | |||
| HVC-3CE1-G6E-2300 | Capacitance gauge | 1 · 10-1 – 1.1 · 10*3 mbar | CDG160D | 0,15 | 1000 | 8 VCR female | On request | More info | |||
| HVC-3CE1-G6H-2300 | Capacitance gauge | 1 · 10-1 – 1.1 · 10*3 mbar | CDG160D | 0,15 | 1000 | 8 VCR female long | On request | More info | |||
| HVC-3CE1-C61-2300 | Capacitance gauge | 1 · 10-² – 1,1 · 10² mbar | CDG160D | 0,15 | 100 | DN 16 ISO-KF | On request | More info | |||
| HVC-3CE1-C63-2300 | Capacitance gauge | 1 · 10-² – 1,1 · 10² mbar | CDG160D | 0,15 | 100 | DN 16 CF-R | On request | More info | |||
| HVC-3CE1-C69-2300 | Capacitance gauge | 1 · 10-² – 1,1 · 10² mbar | CDG160D | 0,15 | 100 | tube OD ½” | On request | More info | |||
| HVC-3CE1-C6C-2300 | Capacitance gauge | 1 · 10-² – 1,1 · 10² mbar | CDG160D | 0,15 | 100 | 4 VCR male | On request | More info | |||
| HVC-3CE1-C6D-2300 | Capacitance gauge | 1 · 10-² – 1,1 · 10² mbar | CDG160D | 0,15 | 100 | 4 VCR female | On request | More info | |||
| HVC-3CE1-C6E-2300 | Capacitance gauge | 1 · 10-² – 1,1 · 10² mbar | CDG160D | 0,15 | 100 | 8 VCR female | On request | More info | |||
| HVC-3CE1-C6H-2300 | Capacitance gauge | 1 · 10-² – 1,1 · 10² mbar | CDG160D | 0,15 | 100 | 8 VCR female long | On request | More info | |||
| HVC-3CE1-961-2300 | Capacitance gauge | 1 · 10-³ – 1.1 · 10 mbar | CDG160D | 0,15 | 10 | DN 16 ISO-KF | On request | More info | |||
| HVC-3CE1-963-2300 | Capacitance gauge | 1 · 10-³ – 1.1 · 10 mbar | CDG160D | 0,15 | 10 | DN 16 CF-R | On request | More info | |||
| HVC-3CE1-969-2300 | Capacitance gauge | 1 · 10-³ – 1.1 · 10 mbar | CDG160D | 0,15 | 10 | tube OD ½” | On request | More info | |||
| HVC-3CE1-96C-2300 | Capacitance gauge | 1 · 10-³ – 1.1 · 10 mbar | CDG160D | 0,15 | 10 | 4 VCR male | On request | More info | |||
| HVC-3CE1-96D-2300 | Capacitance gauge | 1 · 10-³ – 1.1 · 10 mbar | CDG160D | 0,15 | 10 | 4 VCR female | On request | More info | |||
| HVC-3CE1-96E-2300 | Capacitance gauge | 1 · 10-³ – 1.1 · 10 mbar | CDG160D | 0,15 | 10 | 8 VCR female | On request | More info | |||
| HVC-3CE1-96H-2300 | Capacitance gauge | 1 · 10-³ – 1.1 · 10 mbar | CDG160D | 0,15 | 10 | 8 VCR female long | On request | More info | |||
| HVC-3CE1-661-2300 | Capacitance gauge | 1 · 10-4 – 1.1E0 mbar | CDG160D | 0,15 | 1 | DN 16 ISO-KF | On request | More info | |||
| HVC-3CE1-663-2300 | Capacitance gauge | 1 · 10-4 – 1.1E0 mbar | CDG160D | 0,15 | 1 | DN 16 CF-R | On request | More info | |||
| HVC-3CE1-669-2300 | Capacitance gauge | 1 · 10-4 – 1.1E0 mbar | CDG160D | 0,15 | 1 | tube OD ½” | On request | More info | |||
| HVC-3CE1-66C-2300 | Capacitance gauge | 1 · 10-4 – 1.1E0 mbar | CDG160D | 0,15 | 1 | 4 VCR male | On request | More info | |||
| HVC-3CE1-66D-2300 | Capacitance gauge | 1 · 10-4 – 1.1E0 mbar | CDG160D | 0,15 | 1 | 4 VCR female | On request | More info | |||
| HVC-3CE1-66E-2300 | Capacitance gauge | 1 · 10-4 – 1.1E0 mbar | CDG160D | 0,15 | 1 | 8 VCR female | On request | More info | |||
| HVC-3CE1-66H-2300 | Capacitance gauge | 1 · 10-4 – 1.1E0 mbar | CDG160D | 0,15 | 1 | 8 VCR female long | On request | More info |
= Out of stock