CAPACITANCE MANOMETERS SKY® CDG160D, high temperature application, temperature controlled

Inficon SKY® CDG160D, 1100 mbar, DN 16 ISO-KF

INFICON SKY CDG160D high temperature manometers are your best choice for accurate total pressure measurement and control.

CDG160D gauges are temperature controlled at 160 °C for superior performance in demanding semiconductor and plasma processes. They are available for full scale ranges from 1 Torr to 1000 Torr, with all common flange types and fieldbus interfaces and provide a linear 0 to 10 V, gas type independent, pressure signal. INFICON capacitance manometers use an ultra pure alumina ceramic diaphragm which is corrosion proof.

The advantages of the ceramic sensor are better signal stability, faster recovery from atmosphere, short warm up time and an extraordinary lifetime. INFICON CDG are high quality, cost effective pressure sensors for demanding semiconductor, plasma and vacuum applications.

Also available with EtherCAT digital interface!

Code	Type	Measuring range	Gauge model	Precision: % of measurement [%]	Full scale (hPa)	Flange	Price ex.	More info
HVC-3CE1-G61-2300	Capacitance gauge	1 · 10-1 – 1.1 · 10*3 mbar	SKY® CDG160D	0,15	1000	DN 16 ISO-KF	On request	More info
HVC-3CE1-G63-2300	Capacitance gauge	1 · 10-1 – 1.1 · 10*3 mbar	SKY® CDG160D	0,15	1000	DN 16 CF-R	On request	More info
HVC-3CE1-G69-2300	Capacitance gauge	1 · 10-1 – 1.1 · 10*3 mbar	SKY® CDG160D	0,15	1000	tube OD ½”	On request	More info
HVC-3CE1-G6C-2300	Capacitance gauge	1 · 10-1 – 1.1 · 10*3 mbar	SKY® CDG160D	0,15	1000	4 VCR male	On request	More info
HVC-3CE1-G6D-2300	Capacitance gauge	1 · 10-1 – 1.1 · 10*3 mbar	SKY® CDG160D	0,15	1000	4 VCR female	On request	More info
HVC-3CE1-G6E-2300	Capacitance gauge	1 · 10-1 – 1.1 · 10*3 mbar	SKY® CDG160D	0,15	1000	8 VCR female	On request	More info
HVC-3CE1-G6H-2300	Capacitance gauge	1 · 10-1 – 1.1 · 10*3 mbar	SKY® CDG160D	0,15	1000	8 VCR female long	On request	More info
HVC-3CE1-C61-2300	Capacitance gauge	1 · 10-² – 1,1 · 10² mbar	SKY® CDG160D	0,15	100	DN 16 ISO-KF	On request	More info
HVC-3CE1-C63-2300	Capacitance gauge	1 · 10-² – 1,1 · 10² mbar	SKY® CDG160D	0,15	100	DN 16 CF-R	On request	More info
HVC-3CE1-C69-2300	Capacitance gauge	1 · 10-² – 1,1 · 10² mbar	SKY® CDG160D	0,15	100	tube OD ½”	On request	More info
HVC-3CE1-C6C-2300	Capacitance gauge	1 · 10-² – 1,1 · 10² mbar	SKY® CDG160D	0,15	100	4 VCR male	On request	More info
HVC-3CE1-C6D-2300	Capacitance gauge	1 · 10-² – 1,1 · 10² mbar	SKY® CDG160D	0,15	100	4 VCR female	On request	More info
HVC-3CE1-C6E-2300	Capacitance gauge	1 · 10-² – 1,1 · 10² mbar	SKY® CDG160D	0,15	100	8 VCR female	On request	More info
HVC-3CE1-C6H-2300	Capacitance gauge	1 · 10-² – 1,1 · 10² mbar	SKY® CDG160D	0,15	100	8 VCR female long	On request	More info
HVC-3CE1-961-2300	Capacitance gauge	1 · 10-³ – 1.1 · 10 mbar	SKY® CDG160D	0,15	10	DN 16 ISO-KF	On request	More info
HVC-3CE1-963-2300	Capacitance gauge	1 · 10-³ – 1.1 · 10 mbar	SKY® CDG160D	0,15	10	DN 16 CF-R	On request	More info
HVC-3CE1-969-2300	Capacitance gauge	1 · 10-³ – 1.1 · 10 mbar	SKY® CDG160D	0,15	10	tube OD ½”	On request	More info
HVC-3CE1-96C-2300	Capacitance gauge	1 · 10-³ – 1.1 · 10 mbar	SKY® CDG160D	0,15	10	4 VCR male	On request	More info
HVC-3CE1-96D-2300	Capacitance gauge	1 · 10-³ – 1.1 · 10 mbar	SKY® CDG160D	0,15	10	4 VCR female	On request	More info
HVC-3CE1-96E-2300	Capacitance gauge	1 · 10-³ – 1.1 · 10 mbar	SKY® CDG160D	0,15	10	8 VCR female	On request	More info
HVC-3CE1-96H-2300	Capacitance gauge	1 · 10-³ – 1.1 · 10 mbar	SKY® CDG160D	0,15	10	8 VCR female long	On request	More info
HVC-3CE1-661-2300	Capacitance gauge	1 · 10-4 – 1.1E0 mbar	SKY® CDG160D	0,15	1	DN 16 ISO-KF	On request	More info
HVC-3CE1-663-2300	Capacitance gauge	1 · 10-4 – 1.1E0 mbar	SKY® CDG160D	0,15	1	DN 16 CF-R	On request	More info
HVC-3CE1-669-2300	Capacitance gauge	1 · 10-4 – 1.1E0 mbar	SKY® CDG160D	0,15	1	tube OD ½”	On request	More info
HVC-3CE1-66C-2300	Capacitance gauge	1 · 10-4 – 1.1E0 mbar	SKY® CDG160D	0,15	1	4 VCR male	On request	More info
HVC-3CE1-66D-2300	Capacitance gauge	1 · 10-4 – 1.1E0 mbar	SKY® CDG160D	0,15	1	4 VCR female	On request	More info
HVC-3CE1-66E-2300	Capacitance gauge	1 · 10-4 – 1.1E0 mbar	SKY® CDG160D	0,15	1	8 VCR female	On request	More info
HVC-3CE1-66H-2300	Capacitance gauge	1 · 10-4 – 1.1E0 mbar	SKY® CDG160D	0,15	1	8 VCR female long	On request	More info

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