Main characteristics: no tip-seal replacement, no perfomance deteroration, no particles, no oil smoke, no chamber contamination, hassle free to replace rotary/scroll pumps, condensation-prone gas, low noise and low vibration.

Kashiyama NeoDry Pumps are an excellent alternative to rotary vane wet pumps and dry scroll pumps where dry inert gas, high moisture content inert gas, or mildly aggressive gasses require oil-free pumping. The NeoDry Series, with pumping speeds of 110, 250, 500, 600, 1000, 1670 and 5000 liters/min, does not require cooling water or nitrogen purge.

Applications

General Applications

NeoDry pumps perform excellently on load locks, PVD systems, analytical instruments and electron microscopes.

Pharmaceutical Labs

NeoDry Pumps are an excellent choice to replace environmentally unfriendly rotary vane pumps, and since they do not have tip seals, they eliminate tip seal swelling that occurs with dry scroll pumps when exposed to typical lab chemistries and high-moisture content.

Medical OEM Equipment

The NeoDry’s compact, quiet design combined with the ability to support mild chemistry and high-moisture content makes it an excellent series for OEM medical equipment.

For more aggressive applications, the NeoDry series provides an option for air or N2 purge to support the rapid removal of large amounts of water vapor and mild process gasses.